Articles

Versatile stepper based maskless microlithography using a liquid crystal display for direct write of binary and multilevel microstructures

[+] Author Affiliations
Mélanie V. Kessels

Groupe des Ecoles des Télécommunications, Ecole Nationale Supérieure des Télécommunications de Bretagne, Technopôle Brest Iroise, CS 83818, 29238 Brest Cedex 3, France Melanie.Kessels@enst-bretagne.fr

Marwa El Bouz

Groupe des Ecoles des Télécommunications, Ecole Nationale Supérieure des Télécommunications de Bretagne, Technopôle Brest Iroise, CS 83818, 29238 Brest Cedex 3, France Melanie.Kessels@enst-bretagne.fr

Robin Pagan

MIVA Technologies GmbH, Benzstr. 17, Business Park Schönaich, 71101 Schönaich, Germany

Kevin Heggarty

Groupe des Ecoles des Télécommunications, Ecole Nationale Supérieure des Télécommunications de Bretagne, Technopôle Brest Iroise, CS 83818, 29238 Brest Cedex 3, France

J. Micro/Nanolith. MEMS MOEMS. 6(3), 033002 (August 06, 2007). doi:10.1117/1.2767331
History: Received August 03, 2006; Revised December 22, 2006; Accepted March 29, 2007; Published August 06, 2007
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A versatile photolithographic photoplotter based on a standard photoreduction stepper, where the reticle is replaced by a commercial liquid crystal microdisplay, is reported. The microdisplay module is designed as a drop-in replacement, allowing the photoplotter to be simply and quickly converted into a standard stepper, making it an extremely versatile, low-cost research and development tool. Binary and multilevel plotting are demonstrated with plot rates of several Mpixels/s and 1-μm feature sizes into standard industrial photoresist. The limitations on plot rate and resolution are presented and techniques for overcoming them discussed.

© 2007 Society of Photo-Optical Instrumentation Engineers

Citation

Mélanie V. Kessels ; Marwa El Bouz ; Robin Pagan and Kevin Heggarty
"Versatile stepper based maskless microlithography using a liquid crystal display for direct write of binary and multilevel microstructures", J. Micro/Nanolith. MEMS MOEMS. 6(3), 033002 (August 06, 2007). ; http://dx.doi.org/10.1117/1.2767331


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