Development and evolution of MOEMS technology in variable optical attenuators

Chengkuo Lee; Jer-Liang Andrew Yeh

doi:10.1117/1.2949816

1 April 2008 Development and evolution of MOEMS technology in variable optical attenuators

Chengkuo Lee, Jer-Liang Andrew Yeh

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 7, Issue 2, 021003 (April 2008). https://doi.org/10.1117/1.2949816

Abstract

Optical microelectromechanical systems (MEMS) technology or micro-optoelectromechanical systems (MOEMS) technology has proven to be an enabling technology for many components of optical networking applications. Due to their widespread applications, MEMS variable optical attenuators (VOA) have been one of the most attractive MEMS-based key devices in the optical communication market. Micromachined shutters and refractive mirrors assembled with 2D and 3D optics are the subjects of tremendous research activity. We conduct a comprehensive literature survey with respect to technologies such as fabrication processes, optical designs, actuators, and systems. Apparently, MEMS VOA technology is still evolving into a mature technology step by step. MEMS VOA technology is not only the cornerstone to support future optical communication technology, but also the best example for understanding the evolution of MOEMS technology and the commercialization of MOEMS devices.

©(2008) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Chengkuo Lee and Jer-Liang Andrew Yeh "Development and evolution of MOEMS technology in variable optical attenuators," Journal of Micro/Nanolithography, MEMS, and MOEMS 7(2), 021003 (1 April 2008). https://doi.org/10.1117/1.2949816

Published: 1 April 2008

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available