Special Section on Silicon-Based MOEMS and Their Applications

Investigation and characterization of highly efficient near-infrared scanning gratings used in near-infrared microspectrometers

[+] Author Affiliations
Fabian Zimmer

Fraunhofer Institute of Photonic Microsystems, Maria-Reiche-Strasse 2, D-01109 Dresden, Germany

Andreas Heberer

Fraunhofer Institute of Photonic Microsystems, Maria-Reiche-Strasse 2, D-01109 Dresden, Germany

Heinrich Grüger

Fraunhofer Institute of Photonic Microsystems, Maria-Reiche-Strasse 2, D-01109 Dresden, Germany

Harald Schenk

Fraunhofer Institute of Photonic Microsystems, Maria-Reiche-Strasse 2, D-01109 Dresden, Germany

J. Micro/Nanolith. MEMS MOEMS. 7(2), 021005 (May 02, 2008). doi:10.1117/1.2911035
History: Received July 31, 2007; Revised October 09, 2007; Accepted October 15, 2007; Published May 02, 2008
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We present investigations of a new miniaturized NIR spectrometer with a size of only 10×8×8cm3, and a MOEMS-scanning-grating chip as a main element. It works currently in a spectral range of 1200 to 1900nm with a resolution of less than 10nm using only one single InGaAs diode as a detector. One entire spectral measurement is done within 6msec, calculated by a digital signal processor, which is included in the spectrometer. The MOEMS-scanning-grating chip is resonantly driven by a pulsed voltage of up to 36V, has a grating plate 3×3mm2, and reaches deflection angles of ±8deg at 25V. Control and investigation of the deflection angle, the static deformation, the spectral efficiency, and the mechanical shock resistance are key parameters to reach the spectrometer specifications. Results of these measurements and their influence on the spectrometer are discussed. Special etch control structures to monitor the fabrication process of the grating structure in the nanometer range, which can be easily done by microscopic inspection, are also presented.

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© 2008 Society of Photo-Optical Instrumentation Engineers

Citation

Fabian Zimmer ; Andreas Heberer ; Heinrich Grüger and Harald Schenk
"Investigation and characterization of highly efficient near-infrared scanning gratings used in near-infrared microspectrometers", J. Micro/Nanolith. MEMS MOEMS. 7(2), 021005 (May 02, 2008). ; http://dx.doi.org/10.1117/1.2911035


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