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Novel InP-based optical MEMS device

[+] Author Affiliations
Cho Jui Tay

National University of Singapore, Department of Mechanical Engineering, 10 Kent Ridge Crescent, Singapore 119260

Ramam Akkipeddi

Institute of Materials Research and Engineering, SERC Nanofabrication and Characterization Facility (SNFC), 3 Research Link, Singapore 117602

Mahadevaiah Gopal

National University of Singapore, Department of Mechanical Engineering, 10 Kent Ridge Crescent, Singapore 119260

J. Micro/Nanolith. MEMS MOEMS. 7(3), 033016 (August 11, 2008). doi:10.1117/1.2959175
History: Received July 27, 2007; Revised March 24, 2008; Accepted May 12, 2008; Published August 11, 2008
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We present a method for the design and fabrication of InP-based free-standing microelectromechanical systems structures, which include microcantilever beams and Fabry–Perot membranes. The membrane is designed to satisfy both mechanical and optical requirements for a wavelength division multiplexing device and micro-Raman spectroscopy technique is used to evaluate surface stresses. The membrane profile is measured using a white-light interferometry technique, and the effect of the structure geometry on residual stress formation is discussed. From the results obtained, we propose a novel filter design that shows minimum surface profile deviation and stresses.

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© 2008 Society of Photo-Optical Instrumentation Engineers

Citation

Cho Jui Tay ; Ramam Akkipeddi and Mahadevaiah Gopal
"Novel InP-based optical MEMS device", J. Micro/Nanolith. MEMS MOEMS. 7(3), 033016 (August 11, 2008). ; http://dx.doi.org/10.1117/1.2959175


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