Special Section on Theory and Practice of MEMS/NEMS/MOEMS, RF MEMS, and BioMEMS

Development of 2.4-GHz film bulk acoustic wave filter for wireless communication

[+] Author Affiliations
Chi-Ming Fang

National Taiwan University, Institute of Applied Mechanics, 1, Sec. 4, Roosevelt Road, Taipei 106, Taiwan

Shih-Yung Pao

National Taiwan University, Institute of Applied Mechanics, 1, Sec. 4, Roosevelt Road, Taipei 106, Taiwan

Chi-Yuan Lee

Yuan Ze University, Department of Mechanical Engineering, Fuel Cell Research Center, 135 Yuan-Tung Road, Chungli, 320 Taoyuan, Taiwan

Yi-Chang Lu

Asia Pacific Microsystems, Inc., No. 2, R&D Road 6, Science-Based Industrial Park, Hsinchu, Taiwan

Pei-Yen Chen

Chung-Shan Institute of Science and Technology, Materials and Electro-Optics Research Division, P.O. Box 90008-8-6, Lung-Tan, Tao-Yuan 325, Taiwan

Yung-Chung Chin

TXC Corporation, 4 Kung Yeh 6th Road, Cheng City, Tao Yuan 324, Taiwan

Pei-Zen Chang

National Taiwan University, Institute of Applied Mechanics, 1, Sec. 4, Roosevelt Road, Taipei 106, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 8(2), 021121 (April 08, 2009). doi:10.1117/1.3094749
History: Received August 14, 2008; Revised November 22, 2008; Accepted December 08, 2008; Published April 08, 2009
Text Size: A A A

This research shows the realization of 2.4-GHz film bulk acoustic wave (FBAW) filters. The design, simulation, fabrication, measurement, and analysis of the film bulk acoustic wave resonator (FBAR) devices are covered, which is helpful for the manufacture of the FBAR devices. The simulation of the FBAR and RF circuitry can be integrated on a single platform. The fabrication of the FBAW filters is compatible with complementary metal-oxide semiconductors. This device can be used in 2.4-GHz bandpass filters, such as 802.11b/g and Bluetooth. In this research, the 2.4-GHz FBAW filters for wireless communication have been accomplished. The fabricated FBAW filters have insertion loss of 10dB, return loss of 7dB, and stopband rejection of 25dB, central frequency of 2.485GHz, bandwidth of 60MHz, and size of 0.5mm×0.5mm.

Figures in this Article
© 2009 Society of Photo-Optical Instrumentation Engineers

Citation

Chi-Ming Fang ; Shih-Yung Pao ; Chi-Yuan Lee ; Yi-Chang Lu ; Pei-Yen Chen, et al.
"Development of 2.4-GHz film bulk acoustic wave filter for wireless communication", J. Micro/Nanolith. MEMS MOEMS. 8(2), 021121 (April 08, 2009). ; http://dx.doi.org/10.1117/1.3094749


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.