This research shows the realization of film bulk acoustic wave (FBAW) filters. The design, simulation, fabrication, measurement, and analysis of the film bulk acoustic wave resonator (FBAR) devices are covered, which is helpful for the manufacture of the FBAR devices. The simulation of the FBAR and RF circuitry can be integrated on a single platform. The fabrication of the FBAW filters is compatible with complementary metal-oxide semiconductors. This device can be used in bandpass filters, such as 802.11b/g and Bluetooth. In this research, the FBAW filters for wireless communication have been accomplished. The fabricated FBAW filters have insertion loss of , return loss of , and stopband rejection of , central frequency of , bandwidth of , and size of .