Polysilicon thermal microactuators for heat scavenging and power conversion

Jorge Varona; Margarita Tecpoyotl-Torres; Anas A. Hamoui; Jesus Ecobedo-Alatorre; Jose Javier Sánchez-Mondragón

doi:10.1117/1.3152001

1 April 2009 Polysilicon thermal microactuators for heat scavenging and power conversion

Jorge Varona, Margarita Tecpoyotl-Torres, Anas A. Hamoui, Jesus Ecobedo-Alatorre, Jose Javier Sánchez-Mondragón

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 8, Issue 2, 023020 (April 2009). https://doi.org/10.1117/1.3152001

Abstract

We describe the design and experimental characterization of two optimized thermal actuators devised to operate by means of scavenging heat from the environment. Different from the traditional MEMS thermal actuator that relies on electric current to generate heat by Joule effect, the devices presented here are optimized to absorb external heat and convert it into mechanical displacement and force. The behavior of vertical and horizontal microactuators fabricated in a standard surface micromachining process (PolyMUMPs, Research Triangle Park, North Carolina) demonstrates the viability of exploiting heat from the surrounding medium to realize batteryless microsystems. Analytical and finite element models are provided in support of the design. Results show that fairly large and useful displacements can be achieved at commonly available operating temperatures.

©(2009) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Jorge Varona, Margarita Tecpoyotl-Torres, Anas A. Hamoui, Jesus Ecobedo-Alatorre, and Jose Javier Sánchez-Mondragón "Polysilicon thermal microactuators for heat scavenging and power conversion," Journal of Micro/Nanolithography, MEMS, and MOEMS 8(2), 023020 (1 April 2009). https://doi.org/10.1117/1.3152001

Published: 1 April 2009

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