Articles

SU-8 rib waveguide Bragg grating filter using composite stamp and solvent-assisted microcontact molding technique

[+] Author Affiliations
Cheng-Sheng Huang

University of Washington, Department of Mechanical Engineering, Seattle, Washington 98195

Yue-Bun Pun

City University of Hong Kong, Department of Electronic Engineering, Tat Chee Avenue, Kowloon, Hong Kong

Wei-Chih Wang

University of Washington, Department of Mechanical Engineering and Department of Electrical Engineering, Seattle, Washington 98195

J. Micro/Nanolith. MEMS MOEMS. 9(2), 023013 (June 15, 2010). doi:10.1117/1.3453671
History: Received October 06, 2009; Revised April 12, 2010; Accepted April 21, 2010; Published June 15, 2010; Online June 15, 2010
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We present a simple fabrication technique using a hydrophobic composite elastomer for patterning an SU-8-based rib waveguide Bragg grating filter via solvent-assisted microcontact molding (SAMIM). The proposed technique utilizes a two-layered composite stamp made of polydimethylsiloxane and hard polydimethylsiloxane, which enables both the rib waveguide and surface relief grating structure to be patterned simultaneously. The SAMIM method realizes patterning at ambient temperatures with the weight of the mold applying all the pressure necessary. By allowing the mold to absorb solvent when in contact with the polymer, the solvent dissolves or swells the polymer’s surface, creating the desired pattern. This composite mold successfully demonstrates the SAMIM creation of the SU-8 rib waveguide and gratings, paving the way for a facile and efficient reproduction of a polymeric rib waveguide grating filter. Based on experimental results, the stamp demonstrates an operational life span in excess of 10 successful replications, utilizing a Bragg grating test pattern with a grating period of 492nm, a depth of 250nm, and a total length of 12mm. The resulting waveguides show a band-rejection gain of 17dB at the center wavelength of 1545nm and a 3-dB bandwidth of 2.5nm.

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© 2010 Society of Photo-Optical Instrumentation Engineers

Citation

Cheng-Sheng Huang ; Yue-Bun Pun and Wei-Chih Wang
"SU-8 rib waveguide Bragg grating filter using composite stamp and solvent-assisted microcontact molding technique", J. Micro/Nanolith. MEMS MOEMS. 9(2), 023013 (June 15, 2010). ; http://dx.doi.org/10.1117/1.3453671


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