Articles

Molybdenum-doped zinc oxide nanocomposite transparent film derived by sputtering technique

[+] Author Affiliations
Po-Tsung Hsieh

National Cheng Kung University, Center for Micro/Nano Science and Technology, Number 1, University Road, Tainan 701, Taiwan

Tao-Hsing Chen

National Kaohsiung University of Applied Sciences, Department of Mechanical Engineering, 415 Chien Kung Road, Kaohsiung 807, Taiwan

Chao-Yu Huang

National Cheng Kung University, Department of Mechanical Engineering, Number 1, University Road, Tainan 701, Taiwan

Ji-Quan Wang

National Cheng Kung University, Department of Mechanical Engineering, Number 1, University Road, Tainan 701, Taiwan

Ricky-Wenkuei Chuang

National Cheng Kung University, Center for Micro/Nano Science and Technology, and Institute of Microelectronics, Department of Electrical Engineering, Number 1, University Road, Tainan 701, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 9(4), 043004 (December 20, 2010). doi:10.1117/1.3514706
History: Received December 30, 2009; Revised August 17, 2010; Accepted September 28, 2010; Published December 20, 2010; Online December 20, 2010
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A molybdenum (Mo)-doped zinc oxide thin film is deposited on a glass substrate by a rf magnetron sputtering technique. The structural and optical characteristics of ZnO:Mo (ZMO) thin films prepared with various deposition parameters are investigated. A series of SEM images obtained reveal that the average grain size of ZMO thin films is small and uniform. Energy dispersive spectroscopy analysis also verifies that traces of Mo are present in the as-grown thin films. The thicknesses of these ZMO films ranging from 150 to 390 nm are obtained by varying pertinent sputtering parameters. The average transmittance of ZMO thin films measured is more than 80% in the visible spectrum.

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© 2010 Society of Photo-Optical Instrumentation Engineers

Citation

Po-Tsung Hsieh ; Tao-Hsing Chen ; Chao-Yu Huang ; Ji-Quan Wang and Ricky-Wenkuei Chuang
"Molybdenum-doped zinc oxide nanocomposite transparent film derived by sputtering technique", J. Micro/Nanolith. MEMS MOEMS. 9(4), 043004 (December 20, 2010). ; http://dx.doi.org/10.1117/1.3514706


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