Molybdenum-doped zinc oxide nanocomposite transparent film derived by sputtering technique

Po-Tsung Hsieh; Tao-Hsing Chen; Chao-Yu Huang; Ji-Quan Wang; Ricky-Wenkuei Chuang

doi:10.1117/1.3514706

1 October 2010 Molybdenum-doped zinc oxide nanocomposite transparent film derived by sputtering technique

Po-Tsung Hsieh, Tao-Hsing Chen, Chao-Yu Huang, Ji-Quan Wang, Ricky-Wenkuei Chuang

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 9, Issue 4, 043004 (October 2010). https://doi.org/10.1117/1.3514706

Abstract

A molybdenum (Mo)-doped zinc oxide thin film is deposited on a glass substrate by a rf magnetron sputtering technique. The structural and optical characteristics of ZnO:Mo (ZMO) thin films prepared with various deposition parameters are investigated. A series of SEM images obtained reveal that the average grain size of ZMO thin films is small and uniform. Energy dispersive spectroscopy analysis also verifies that traces of Mo are present in the as-grown thin films. The thicknesses of these ZMO films ranging from 150 to 390 nm are obtained by varying pertinent sputtering parameters. The average transmittance of ZMO thin films measured is more than 80% in the visible spectrum.

©(2010) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Po-Tsung Hsieh, Tao-Hsing Chen, Chao-Yu Huang, Ji-Quan Wang, and Ricky-Wenkuei Chuang "Molybdenum-doped zinc oxide nanocomposite transparent film derived by sputtering technique," Journal of Micro/Nanolithography, MEMS, and MOEMS 9(4), 043004 (1 October 2010). https://doi.org/10.1117/1.3514706

Published: 1 October 2010

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