Special Section on Dimensional Metrology with Atomic Force Microscopy: Instruments and Applications

Evaluation of a vertical piezoelectric transducer stage using a large range metrological atomic force microscope

[+] Author Affiliations
Shihua Wang

National Metrology Centre, Agency for Science, Technology and Research, 1 Science Park Drive, Singapore 118221, Singapore

Siew Leng Tan

National Metrology Centre, Agency for Science, Technology and Research, 1 Science Park Drive, Singapore 118221, Singapore

Gan Xu

National Metrology Centre, Agency for Science, Technology and Research, 1 Science Park Drive, Singapore 118221, Singapore

J. Micro/Nanolith. MEMS MOEMS. 11(1), 011005 (Mar 12, 2012). doi:10.1117/1.JMM.11.1.011005
History: Received May 26, 2011; Revised October 14, 2011; Accepted October 20, 2011
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Abstract.  A method is described for the calibration of vertical piezoelectric transducer (PZT) stages using a large range metrological atomic force microscope (LRM-AFM). A vertical PZT stage is mounted onto the system and an optical-flat sample is attached on the top of the PZT stage. The AFM probe is operated in contact mode and used as a null indicator to measure the movement of the optical-flat as it is driven by the PZT stage. As the PZT stage is scanned vertically, the AFM probe is in contact with the test surface without lateral scanning. The displacement of the vertical stage of the LRM-AFM is measured by the integrated laser interferometer, and the corresponding laser interferometer readings and the nominal position of the PZT stage are recorded. This body of data is then used to establish the relationship between the laser interferometer reading and the nominal displacement of the PZT stage. Our results show that this method can be used to calibrate PZT stages up to a range of 250 µm with an expanded uncertainty of less than 5 nm.

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© 2012 Society of Photo-Optical Instrumentation Engineers

Citation

Shihua Wang ; Siew Leng Tan and Gan Xu
"Evaluation of a vertical piezoelectric transducer stage using a large range metrological atomic force microscope", J. Micro/Nanolith. MEMS MOEMS. 11(1), 011005 (Mar 12, 2012). ; http://dx.doi.org/10.1117/1.JMM.11.1.011005


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