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Design and fabrication of a micromachined free-floating membrane on a flexible substrate

[+] Author Affiliations
Harsh Sundani

University of Toledo, Electrical Engineering and Computer Science Department, MS 301, 2801 W. Bancroft Street, Toledo, Ohio 43606

Vijay Devabhaktuni

University of Toledo, Electrical Engineering and Computer Science Department, MS 301, 2801 W. Bancroft Street, Toledo, Ohio 43606

Christopher Melkonian

Midwest MicroDevices329 14th Street, Toledo, Ohio 43604

Mansoor Alam

University of Toledo, Electrical Engineering and Computer Science Department, MS 301, 2801 W. Bancroft Street, Toledo, Ohio 43606

J. Micro/Nanolith. MEMS MOEMS. 12(1), 013002 (Jan 07, 2013). doi:10.1117/1.JMM.12.1.013002
History: Received February 12, 2012; Revised September 30, 2012; Accepted December 13, 2012
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Abstract.  A microelectromechanical system (MEMS) device might function perfectly well in the controlled environment in which it has been created. However, the device can be a real viable product only after it has been fabricated with proven performance in a package. As such, the assembly yield of a MEMS package is often a challenging target to meet. The design and fabrication of a free-floating membrane on a flexible substrate to enable easy and cost-effective packaging of MEMS devices is examined. Since standard MEMS fabrication processes are designed for rigid substrates, several process modifications were required to handle flexible substrates. The adaptation of each fabrication process has been documented. Furthermore, detailed information regarding the selection of compatible materials, as well as incompatibilities that were encountered, has been presented to aid future researchers in developing processes for flexible substrates.

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© 2013 Society of Photo-Optical Instrumentation Engineers

Citation

Harsh Sundani ; Vijay Devabhaktuni ; Christopher Melkonian and Mansoor Alam
"Design and fabrication of a micromachined free-floating membrane on a flexible substrate", J. Micro/Nanolith. MEMS MOEMS. 12(1), 013002 (Jan 07, 2013). ; http://dx.doi.org/10.1117/1.JMM.12.1.013002


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