Microassembly process to fabricate a microoptoelectromechanical systems scanning mirror with angular vertical comb electrodes

Min-Ho Jun; Seunghwan Moon; Jong-Hyun Lee

doi:10.1117/1.JMM.12.1.013006

1 February 2013 Microassembly process to fabricate a microoptoelectromechanical systems scanning mirror with angular vertical comb electrodes

Min-Ho Jun, Seunghwan Moon, Jong-Hyun Lee

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 12, Issue 1, 013006 (February 2013). https://doi.org/10.1117/1.JMM.12.1.013006

Abstract

We present a simple microassembly technology that easily realizes angular vertical combs for a microoptoelectromechanical systems scanner. The scanner is composed of a device section with comb electrodes and a tilting section with four tapered pillars. During the microassembly process, two tilting pillars push down the levers so that the comb electrodes connected with the micromirror are tilted; the other two alignment pillars fit into the alignment holes of the device section, which is fabricated via a deep reactive ion etching process of a silicon-on-insulator wafer. The tilting section is fabricated through a series of anisotropic wet etching of a (100) silicon wafer and patterning processes of SU-8, which is robust enough to ensure repeatability of the initial tilted angles of the movable comb electrodes. The pull-in investigation function is analyzed through a numerical estimation to obtain a large scan angle with stable behavior. The fabricated microscanner shows an optical scan angle of up to 4.23 deg at 90 V in the static mode and stable actuation of up to 11.3 deg at a resonant frequency of 2.87 kHz. The roughness of the mirror surface is less than 10 nm, which will have a negligible effect on imaging quality. The initial tilted angles in the microassembly process showed high repeatability within 10% error.

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Min-Ho Jun, Seunghwan Moon, and Jong-Hyun Lee "Microassembly process to fabricate a microoptoelectromechanical systems scanning mirror with angular vertical comb electrodes," Journal of Micro/Nanolithography, MEMS, and MOEMS 12(1), 013006 (1 February 2013). https://doi.org/10.1117/1.JMM.12.1.013006

Published: 1 February 2013

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