Silicon mirror arrays fabricated by using bulk and surface micromachining

Thomas Gessner; Wolfram Doetzel; Detlef Billep; Ramon Hahn; Christian Kaufmann; Kersten Kehr; Steffen Kurth; Carmen Steiniger; Udo Wollmann

doi:10.1117/12.271427

11 April 1997 Silicon mirror arrays fabricated by using bulk and surface micromachining

Thomas Gessner, Wolfram Doetzel, Detlef Billep, Ramon Hahn, Christian Kaufmann, Kersten Kehr, Steffen Kurth, Carmen Steiniger, Udo Wollmann

Author Affiliations +

Proceedings Volume 3008, Miniaturized Systems with Micro-Optics and Micromechanics II; (1997) https://doi.org/10.1117/12.271427
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

Recently scanning actuator arrays have developed using metal, e.g. aluminium, or polysilicon as mirror material. Design and technology of micro mirror arrays mad of monocrystalline silicon are discussed in this paper as well as experimental results characterizing the arrays. Micro mirror arrays with up to 1000 simultaneously movable electrostatically operated cells convenient for continuous scanning with frequencies of several hundred Hz up to some kHz will be presented. The technological approaches consist of the use of silicon wet- and dry-etching, wafer bonding and metallization. A novel modified BESOI technology with CMP, wafer bonding with buried refractory metal electrodes and sacrificial layer etching has ben developed and will be discussed. The design process is based on simple analytical calculations of the mechanical behavior, the fluid flow surrounding the movable mirror and the electrostatic field as well as numerical simulations by means of the finite element method and network analysis. Furthermore, some experimental methods to characterize the electro-mechanical behavior of micro mirror arrays are discussed. In order to evaluate theoretical models describing the behavior, the natural frequencies, the damping coefficients and the frequency transfer function are measured. The adaptation of the model parameters leads to more accurate values simulating the behavior.

Citation Download Citation

Thomas Gessner, Wolfram Doetzel, Detlef Billep, Ramon Hahn, Christian Kaufmann, Kersten Kehr, Steffen Kurth, Carmen Steiniger, and Udo Wollmann "Silicon mirror arrays fabricated by using bulk and surface micromachining", Proc. SPIE 3008, Miniaturized Systems with Micro-Optics and Micromechanics II, (11 April 1997); https://doi.org/10.1117/12.271427

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available