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Integrated blue-sensitive polarization-dependent photodetector

[+] Author Affiliations
Jinkui Chu

Dalian University of Technology, Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian, Liaoning 116024, China

Zhiwen Wang

Dalian University of Technology, Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian, Liaoning 116024, China

Yingjie Zhang

Dalian University of Technology, Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian, Liaoning 116024, China

Ze Liu

Dalian University of Technology, Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian, Liaoning 116024, China

Yinlong Wang

Dalian University of Technology, Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian, Liaoning 116024, China

J. Micro/Nanolith. MEMS MOEMS. 12(3), 033005 (Jul 11, 2013). doi:10.1117/1.JMM.12.3.033005
History: Received March 26, 2013; Revised June 6, 2013; Accepted June 13, 2013
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Abstract.  Multioriented bilayer nanowire polarizers are integrated with photodetectors using only one-time nanoimprint lithography and metal deposition process. In order to keep the position of peak external quantum efficiency of the photodetector unchanged, the bilayer nanowire polarizer is designed to have the highest transmission at 440 nm. The photodetector is integrated with the polarizer after surface treatment. The performance of the fabricated device is then tested, and three characteristics are realized: light-intensity sensitive, polarization sensitive, and blue-light sensitive. The proposed integration method simplified the fabrication process, and the fabricated device avoids the alignment error which would be produced by using discrete elements. The results demonstrate that the proposed integration process is a promising method for fabricating photodetectors with polarization function.

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© 2013 Society of Photo-Optical Instrumentation Engineers

Citation

Jinkui Chu ; Zhiwen Wang ; Yingjie Zhang ; Ze Liu and Yinlong Wang
"Integrated blue-sensitive polarization-dependent photodetector", J. Micro/Nanolith. MEMS MOEMS. 12(3), 033005 (Jul 11, 2013). ; http://dx.doi.org/10.1117/1.JMM.12.3.033005


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