Recent demands for emerging miniature components for optical communication, digital imaging, sensors and actuators, wireless systems, and adaptive optics that are low cost with high performance and high reliability led researchers to consider batch processing in high clean room environments being the only solution. MEMS, MOEMS, and micro-optics have a foundation of integrated circuits (ICs) and involve batch processing in clean rooms facilities. MEMS is a microdevice that contains both electrical and mechanical elements. MOEMS is a microdevice that contains electrical, mechanical, and optical elements. Sometimes in literature, optical MEMS refer to MOEMS. However, by definition, optical components in MOEMS are always micro-optics, where in optical MEMS, optical components could be both micro-optics or bulk optics.