Regular Articles

Fabrication of micropressure sensor using SU-8/silver as piezoresistor and overhead projector transparency as substrate

[+] Author Affiliations
Wah Seng Wong

Universiti Sains Malaysia, Engineering Campus, School of Mechanical Engineering, Nibong Tebal, Seberang Perai Selatan, Pulau Pinang, 14300, Malaysia

Ishak Abdul Azid

Universiti Kuala Lumpur, Malaysia Spanish Institute, Mechanical Section, Kulim Hi-TechPark, Kulim, Kedah 09000, Malaysia

Kamarulazizi Ibrahim

Universiti Sains Malaysia, School of Physics, Nano-Optoelectronics Research And Technology Laboratory (N.O.R.), Penang, 11800, Malaysia

Mutharasu Devarajan

Universiti Sains Malaysia, School of Physics, Nano-Optoelectronics Research And Technology Laboratory (N.O.R.), Penang, 11800, Malaysia

J. Micro/Nanolith. MEMS MOEMS. 13(4), 043009 (Nov 06, 2014). doi:10.1117/1.JMM.13.4.043009
History: Received February 19, 2014; Revised September 25, 2014; Accepted October 9, 2014
Text Size: A A A

Abstract.  This paper proposes a low-cost SU-8 pressure sensor fabricated using a piezoresistive material, SU-8/silver composite (SU-8/Ag), and a substrate material, overhead projector (OHP) transparency. SU-8/Ag has higher gauge factor (26.3) but shows a lower stiffness (2 GPa) compared with doped silicon. The OHP transparency substrate is cheap, easily forms the desired shape, is transparent to light (allows backside exposure), and allows for the dry release method through OHP transparency. Fabrication and characterization in this study were carried out using a typical semiconductor lab setup. The fabricated sensor showed high sensitivity (21.5μV/Pa), low linearity error (Pearson’s correlation coefficient=0.994937), and no apparent hysteresis response. The fabricated sensor with SU-8/Ag as the piezoresistive material exhibited 41 times higher sensitivity compared to that found in a previous study based on SU-8 and doped polysilicon.

Figures in this Article
© 2014 Society of Photo-Optical Instrumentation Engineers

Citation

Wah Seng Wong ; Ishak Abdul Azid ; Kamarulazizi Ibrahim and Mutharasu Devarajan
"Fabrication of micropressure sensor using SU-8/silver as piezoresistor and overhead projector transparency as substrate", J. Micro/Nanolith. MEMS MOEMS. 13(4), 043009 (Nov 06, 2014). ; http://dx.doi.org/10.1117/1.JMM.13.4.043009


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.