Optimizing the response time of Ni-based resistive temperature detectors

Deok Su Kim; Kyo Sang Choi; Hee Jun Yang; Min Soo Ryu; Ji Sung Chae; Sung Pil Chang

doi:10.1117/1.JMM.14.2.025002

18 May 2015 Optimizing the response time of Ni-based resistive temperature detectors

Deok Su Kim, Kyo Sang Choi, Hee Jun Yang, Min Soo Ryu, Ji Sung Chae, Sung Pil Chang

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 14, Issue 2, 025002 (May 2015). https://doi.org/10.1117/1.JMM.14.2.025002

Abstract

Resistive temperature detectors (RTDs) are widely used to monitor and control the temperature of work environments due to their higher sensitivity, excellent reliability and stability, and very linear output signal compared to other types of temperature detectors. However, RTDs have some shortcomings, including a slow response time. A nickel-based RTDs were designed, fabricated, and characterized in order to achieve faster response times. We used micromachining processes to analyze devices with different resistor thicknesses, distances between resistor lines, and resistor line widths. The response times of the RTDs were measured to be between 7.5104 and 23.4583 s. From these measurement data, we can conclude that thinner RTDs with larger surface areas show improved response times.

Citation Download Citation

Deok Su Kim, Kyo Sang Choi, Hee Jun Yang, Min Soo Ryu, Ji Sung Chae, and Sung Pil Chang "Optimizing the response time of Ni-based resistive temperature detectors," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(2), 025002 (18 May 2015). https://doi.org/10.1117/1.JMM.14.2.025002

Published: 18 May 2015

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available