Microfabrication

Investigation of SU8 as a structural material for fabricating passive millimeter-wave and terahertz components

[+] Author Affiliations
Yingtao Tian

University of Birmingham, School of Electronic, Electrical, and Systems Engineering, West Midlands B15 2TT, United Kingdom

University of Manchester, School of Materials, Manchester M13 9PL, United Kingdom

Xiaobang Shang, Michael J. Lancaster

University of Birmingham, School of Electronic, Electrical, and Systems Engineering, West Midlands B15 2TT, United Kingdom

Yi Wang

University of Greenwich, Faculty of Engineering and Sciences, Chatham, ME4 4TB Kent, United Kingdom

J. Micro/Nanolith. MEMS MOEMS. 14(4), 044507 (Dec 29, 2015). doi:10.1117/1.JMM.14.4.044507
History: Received October 8, 2015; Accepted November 24, 2015
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Abstract.  This paper provides a systematic review of the technical issues of SU8 fabrication for millimeter-wave and terahertz components based on research carried out at the University of Birmingham in the past decade. A design-for-manufacturability approach is followed. The flexibility of the SU8 process enables many device structures. Challenges and problems during fabrication will be discussed and demonstrated with examples. The measurement of the devices is also a significant challenge when the critical dimensions of the device shrink and special testing fixtures are needed in some cases. Finally, a brief overview of the issues discussed above is given for future guidance.

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© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Yingtao Tian ; Xiaobang Shang ; Yi Wang and Michael J. Lancaster
"Investigation of SU8 as a structural material for fabricating passive millimeter-wave and terahertz components", J. Micro/Nanolith. MEMS MOEMS. 14(4), 044507 (Dec 29, 2015). ; http://dx.doi.org/10.1117/1.JMM.14.4.044507


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