Microelectromechanical Systems (MEMS)

Flexible, high-density microphotodiode array with integrated sputtered iridium oxide electrodes for retinal stimulation

[+] Author Affiliations
Frank Yang, Mao-Yen Chang, Chung-Hua Yang, Chih-Ciao Teng, Long-Sheng Fan

National Tsing Hua University, Institute of NanoEngineering and MicroSystems, Hsin-Chu 30013, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 15(1), 015002 (Mar 11, 2016). doi:10.1117/1.JMM.15.1.015002
History: Received August 24, 2015; Accepted February 9, 2016
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Abstract.  To assess the charge-injection capacity of the sputtered iridium oxide film (SIROF) electrode on the retinal CMOS image sensor (CIS) chip, a polyimide-based flex device was designed and fabricated to package the retinal CIS chip. The polyimide-flex-based packaging process keeps the surface of photosensors clean, and the measured connection resistance meets the packaging requirement of the low-power retinal CIS chip. The in vitro experimental results show that the small SIROF electrodes can provide a biphasic charge injection per phase of 3.9  nC/ph to achieve the stimulation threshold at a polarization potential of 0.44  V.

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© 2016 Society of Photo-Optical Instrumentation Engineers

Citation

Frank Yang ; Mao-Yen Chang ; Chung-Hua Yang ; Chih-Ciao Teng and Long-Sheng Fan
"Flexible, high-density microphotodiode array with integrated sputtered iridium oxide electrodes for retinal stimulation", J. Micro/Nanolith. MEMS MOEMS. 15(1), 015002 (Mar 11, 2016). ; http://dx.doi.org/10.1117/1.JMM.15.1.015002


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