Thick-film MEMS thermoelectric sensor fabricated using a thermally assisted lift-off process

Yuan Jia; Haogang Cai; Qiao Lin

doi:10.1117/1.JMM.15.2.024501

9 June 2016 Thick-film MEMS thermoelectric sensor fabricated using a thermally assisted lift-off process

Yuan Jia, Haogang Cai, Qiao Lin

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 15, Issue 2, 024501 (June 2016). https://doi.org/10.1117/1.JMM.15.2.024501

Abstract

This paper presents a thick-film microelectromechanical systems thermoelectric sensor fabricated by a low-temperature thermally assisted lift-off process. During the process, thick metal or semiconductor films experience controlled breakup due to thermal reflow of the underlying lithographically defined photoresist patterns, thereby facilitating the sacrificial removal of the photoresist. This enables rapid and reliable patterning of thick films that can otherwise be difficult to achieve by conventional processes. Experimental results with a sensor consisting of a 60-junction thick-film antimony–bismuth thermopile demonstrate an electric conductivity of 5.44×10⁶ S/m and a Seebeck coefficient of 114 μV/K per junction, which are comparable to those obtained from bulk materials. Thus, the thick-film sensor can potentially allow low-noise, high-efficiency thermoelectric measurements.

Citation Download Citation

Yuan Jia, Haogang Cai, and Qiao Lin "Thick-film MEMS thermoelectric sensor fabricated using a thermally assisted lift-off process," Journal of Micro/Nanolithography, MEMS, and MOEMS 15(2), 024501 (9 June 2016). https://doi.org/10.1117/1.JMM.15.2.024501

Published: 9 June 2016

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available