Paper
20 February 2018 Current status of development of low temperature deformable mirrors
Juncheng You, Shuo Lan, Weicai Xu, Haili Hu, Liming Hu, Chuanyang Liang
Author Affiliations +
Proceedings Volume 10697, Fourth Seminar on Novel Optoelectronic Detection Technology and Application; 1069744 (2018) https://doi.org/10.1117/12.2315592
Event: Fourth Seminar on Novel Optoelectronic Detection Technology and Application, 2017, Nanjing, China
Abstract
In adaptive optical (AO) systems, deformable mirrors are used to correct wavefront aberrations. In this study, we introduce various structural deformable mirrors used in low temperature environments: discrete actuators deformable mirror, bimorph deformable mirror, membrane deformable mirror and MEMS deformable mirror. And the basic working principle of these deformed mirrors is briefly described; the research results of low temperature deformable mirrors are presented in detail. According to formerly researches, we found out the two main factors influencing the performance of low temperature deformable mirrors. The advantages and disadvantages of various structural low temperature deformable mirrors are analyzed. Finally, the development trend of low temperature deformable mirrors is prospected.
© (2018) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Juncheng You, Shuo Lan, Weicai Xu, Haili Hu, Liming Hu, and Chuanyang Liang "Current status of development of low temperature deformable mirrors", Proc. SPIE 10697, Fourth Seminar on Novel Optoelectronic Detection Technology and Application, 1069744 (20 February 2018); https://doi.org/10.1117/12.2315592
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KEYWORDS
Deformable mirrors

Actuators

Mirrors

Cryogenics

Microelectromechanical systems

Temperature metrology

Electrodes

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