Computational lithography: accelerating the future

Vivek K. Singh

doi:10.1117/12.2640423

13 June 2022 Computational lithography: accelerating the future

Vivek K. Singh

Proceedings Volume 12052, DTCO and Computational Patterning; 1205207 (2022) https://doi.org/10.1117/12.2640423
Event: SPIE Advanced Lithography + Patterning, 2022, San Jose, California, United States

Abstract

Computational Lithography has come a long way since its inception in the mid-nineties. The problem it solves is both fundamental and difficult, and if one believes in the continuation of Moore’s Law, one can only conclude that this problem is going to become exponentially more challenging. With the relentless march of technology nodes, we have had to squeeze increasingly complex Physics into a limiting compute envelope; several assumptions that were made thus far to arrive at practical computational lithography solutions might soon become invalid. To keep pace with this increasing complexity, computational lithography must change. An obvious path to the next generation of computational lithography solutions is to take advantage of the awesome capabilities of modern GPUs. To do this optimally, we believe, one must reimagine and rearchitect the basic algorithms of computational lithography. This talk will provide both a historic context to this evolution, as well as a glimpse into NVIDIA’s efforts and collaborations to enable next generation computational lithography for the semiconductor industry at large.

Conference Presentation

Citation Download Citation

Vivek K. Singh "Computational lithography: accelerating the future", Proc. SPIE 12052, DTCO and Computational Patterning, 1205207 (13 June 2022); https://doi.org/10.1117/12.2640423

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