Analysis and simulation of a MEMS based accelerometer used to monitor the movement of a sea waves

Valerica Baban; Dănuț Argintaru; Eliodor Constantinescu

doi:10.1117/12.2643251

2 March 2023 Analysis and simulation of a MEMS based accelerometer used to monitor the movement of a sea waves

Valerica Baban, Dănuț Argintaru, Eliodor Constantinescu

Proceedings Volume 12493, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies XI; 1249320 (2023) https://doi.org/10.1117/12.2643251
Event: Advanced Topics in Optoelectronics, Microelectronics and Nanotechnologies 2022, 2022, Constanta, Romania

Abstract

In the marine environment the waves generated by the flow of the wind or by natural phenomena such as earthquakes inside the oceans need to be monitored and known before it takes effect. The sea waves are a complex phenomenon and their behavior is quite difficult to predict. The first step is to take accurate and low cost measurements of the sea surface oscillations. In this paper we model and analyze MEMS capacitive accelerometers using Comsol Multiphysics simulation software for monitoring low amplitude sea waves.

Citation Download Citation

Valerica Baban, Dănuț Argintaru, and Eliodor Constantinescu "Analysis and simulation of a MEMS based accelerometer used to monitor the movement of a sea waves", Proc. SPIE 12493, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies XI, 1249320 (2 March 2023); https://doi.org/10.1117/12.2643251

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