Author Affiliations +
Quentin Evrard,1 Najmeh Sadegh,2 Chao Chun Hsu,1 Nicola Mahne,3 Angelo Giglia,3 Stefano Nannarone,3 Yasin Ekinci,4 Michaela Vockenhuber,4 Akira Nishimura,5 Tsuyoshi Goya,5 Takuo Sugioka,5 Albert M. Brouwer1
1Univ. of Amsterdam (Netherlands)
2Advanced Research Ctr. for Nanolithography (Netherlands)
3Istituto Officina dei Materiali, Consiglio Nazionale delle Ricerche (Italy)
4Paul Scherrer Institute (Switzerland)
5Nippon Shokubai (Japan)