High-brightness LDP source

Kazuya Aoki; Yoshihiko Sato; Yusuke Teramoto; Takahiro Shirai; Shunichi Morimoto; Hidenori Watanabe; Akihisa Nagano; Daisuke Yajima; Noritaka Ashizawa

doi:10.1117/12.2688117

29 September 2023 High-brightness LDP source

Kazuya Aoki, Yoshihiko Sato, Yusuke Teramoto, Takahiro Shirai, Shunichi Morimoto, Hidenori Watanabe, Akihisa Nagano, Daisuke Yajima, Noritaka Ashizawa

Author Affiliations +

Proceedings Volume 12915, Photomask Japan 2023: XXIX Symposium on Photomask and Next-Generation Lithography Mask Technology; 1291509 (2023) https://doi.org/10.1117/12.2688117
Event: Photomask Japan 2023, 2023, Online Only

Abstract

The Laser-assisted Discharge-produced Plasma (LDP) EUV source is a system to generate EUV from discharged plasma triggered by laser on one electrode disc which is coated by tin film. The source has been proven as a highly reliable light source in EUVL high volume production. Also, LDP EUV source enables to generate high brightness with relatively larger EUV plasma, which benefits space stability as well as relatively higher plasma power. In this session, the following items will be presented. (1) LDP EUV source configuration and operation sequence. (2) LDP EUV source key performance (3) Reliability improvement. (4) Others.

Citation Download Citation

Kazuya Aoki, Yoshihiko Sato, Yusuke Teramoto, Takahiro Shirai, Shunichi Morimoto, Hidenori Watanabe, Akihisa Nagano, Daisuke Yajima, and Noritaka Ashizawa "High-brightness LDP source", Proc. SPIE 12915, Photomask Japan 2023: XXIX Symposium on Photomask and Next-Generation Lithography Mask Technology, 1291509 (29 September 2023); https://doi.org/10.1117/12.2688117

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