Novel process for the fabrication of top-drive double stator micromotor on glass

Hocine Ziad; Serge Spirkovitch; Jeannine Marty; Francois Baillieu; Serge Rigo; Neil Milne

doi:10.1117/12.167563

1 February 1994 Novel process for the fabrication of top-drive double stator micromotor on glass

Hocine Ziad, Serge Spirkovitch, Jeannine Marty, Francois Baillieu, Serge Rigo, Neil Milne

Proceedings Volume 2045, Laser-Assisted Fabrication of Thin Films and Microstructures; (1994) https://doi.org/10.1117/12.167563
Event: Optics Quebec, 1993, Quebec City, Canada

Abstract

A top-drive variable capacitance (VC) electrostatic rotational micromotor with double stator was fabricated combining bulk silicon machining with etch stop on junction to anodic bonding of silicon to glass. The novel process overcomes the drawbacks found in the fabrication of top- drive devices by use of usual surface micromachining of polysilicon LPCVD layers.

Citation Download Citation

Hocine Ziad, Serge Spirkovitch, Jeannine Marty, Francois Baillieu, Serge Rigo, and Neil Milne "Novel process for the fabrication of top-drive double stator micromotor on glass", Proc. SPIE 2045, Laser-Assisted Fabrication of Thin Films and Microstructures, (1 February 1994); https://doi.org/10.1117/12.167563

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