Microelectromechanical force probe array

Scott A. Miller; Kimberly L. Turner; Noel C. MacDonald

doi:10.1117/12.271215

15 April 1997 Microelectromechanical force probe array

Scott A. Miller, Kimberly L. Turner, Noel C. MacDonald

Proceedings Volume 3009, Micromachining and Imaging; (1997) https://doi.org/10.1117/12.271215
Event: Photonics West '97, 1997, San Jose, CA, United States

Abstract

The largest array (12 X 12) of microelectromechanical probe tips with integrated actuators and capacitive sensors for scanning probe microscopy has been designed, fabricated, and characterized. Each array element consists of a single crystal silicon tip on a torsional cantilever with out-of- plane interdigitated electrode capacitors. In addition, the size of each array element is about 150 micrometers by 150 micrometers with a tip-to-tip spacing in the array of 200 micrometers . Give these dimensions, the packing density of the devices is about 2500 units/cm². The out-of-plane torsional design allows for significant improvement in performance (larger tip displacement and increased sense capacitance) and a higher density of devices per unit area as the minimum feature size decreases. Applications such as information storage, molecular manipulation, and nanolithography require high density, parallel arrays for reasonable throughput.

Citation Download Citation

Scott A. Miller, Kimberly L. Turner, and Noel C. MacDonald "Microelectromechanical force probe array", Proc. SPIE 3009, Micromachining and Imaging, (15 April 1997); https://doi.org/10.1117/12.271215

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available