Experimental comparison of off-axis illumination and imaging interferometric lithography

Xiaolan Chen; Steven R. J. Brueck

doi:10.1117/12.354390

26 July 1999 Experimental comparison of off-axis illumination and imaging interferometric lithography

Xiaolan Chen, Steven R. J. Brueck

Proceedings Volume 3679, Optical Microlithography XII; (1999) https://doi.org/10.1117/12.354390
Event: Microlithography '99, 1999, Santa Clara, CA, United States

Abstract

Imaging interferometric lithography (IIL) is a newly developed technology extending the resolution of optical lithography (OL) to the linear-systems limits of optics. IIL is an extension of off-axis illumination (OAI) for offset angles larger than the numerical aperture (NA) of the optical system. In this work, the connection of IIL with quadruple OAI is demonstrated by reduction the offset angle to within the optical system NA. This gives rise to an effective optical transfer function that decreases at higher spatial frequencies since multiple counting of the lower frequency space components emphasizes the low-frequency response. Pupil plane filters are introduced to eliminate this multiple coverage and improve the pattern fidelity. Simulation results are in excellent agreement with the experiments, reproducing even the fine pattern details. Tiling of spatial frequency space with different pupil plane filters for both OAI and IIL approaches has also been investigated. Pattern fidelity is significantly affected by the tiling scheme with the IL approach yielding the most robust overall image performance.

Citation Download Citation

Xiaolan Chen and Steven R. J. Brueck "Experimental comparison of off-axis illumination and imaging interferometric lithography", Proc. SPIE 3679, Optical Microlithography XII, (26 July 1999); https://doi.org/10.1117/12.354390

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available