A thermal stack structure for measurement of fluid flow

Hao Zhao; S. J. Neil Mitchell; D. H. Campbell; Harold S. Gamble

doi:10.1117/12.463631

27 August 2003 A thermal stack structure for measurement of fluid flow

Hao Zhao, S. J. Neil Mitchell, D. H. Campbell, Harold S. Gamble

Proceedings Volume 4876, Opto-Ireland 2002: Optics and Photonics Technologies and Applications; (2003) https://doi.org/10.1117/12.463631
Event: OPTO Ireland, 2002, Galway, Ireland

Abstract

A stacked thermal structure for fluid flow sensing has been designed, fabricated, and tested. A double-layer polysilicon process was employed in the fabrication. Flow measurement is based on the transfer of heat from a temperature sensor element to the moving fluid. The undoped or lightly doped polysilicon temperature sensor is located on top of a heavily doped polysilicon heater element. A dielectric layer between the heater and the sensor elements provides both thermal coupling and electrical isolation. In comparison to a hot-wire flow sensor, the heating and sensing functions are separated, allowing the electrical characteristics of each to be optimized. Undoped polysilicon has a large temperature coefficient of resistance (TCR) up to 7 %/K and is thus a preferred material for the sensor. However, heavily doped polysilicon is preferred for the heater due to its lower resistance. The stacked flow sensor structure offers a high thermal sensitivity making it especially suitable for medical applications where the working temperatures are restricted. Flow rates of various fluids can be measured over a wide range. The fabricated flow sensors were used to measure the flow rate of water in the range μl - ml/min and gas (Helium) in the range 10 - 100ml/min.

Citation Download Citation

Hao Zhao, S. J. Neil Mitchell, D. H. Campbell, and Harold S. Gamble "A thermal stack structure for measurement of fluid flow", Proc. SPIE 4876, Opto-Ireland 2002: Optics and Photonics Technologies and Applications, (27 August 2003); https://doi.org/10.1117/12.463631

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available