Designing, fabrication, and test of a MEMS colloid thruster

Zhaoying Zhou; Jijun Xiong; Xiongying Ye; Xiaohao Wang; Yanyin Feng

doi:10.1117/12.483164

10 September 2002 Designing, fabrication, and test of a MEMS colloid thruster

Zhaoying Zhou, Jijun Xiong, Xiongying Ye, Xiaohao Wang, Yanyin Feng

Proceedings Volume 4928, MEMS/MOEMS Technologies and Applications; (2002) https://doi.org/10.1117/12.483164
Event: Photonics Asia, 2002, Shanghai, China

Abstract

A MEMS based micro colloid thruster (including an source emitter array and an extractor) is designed, fabricated and tested. Source emitter array of the thruster is silicon column etched by ICP. The negative electrode on the extractor can be controlled separately. After bonding together, a single emitter and extractor works on an electrical colloid propulsion principle, and produce µN order thrust. Such a small and controllable thrust is the urgent requirement for a micro-satellite. Thrust test for the micro colloid thruster is made in high vacuum box. Thrust is acted on a cantilever beam, and the displacement of cantilever beam is detected by a current vortex sensor. Analysis to the recording data shows that the maxim thrust produced by a single emitter is about 2 µN, which is agreement with theory estimate.

Citation Download Citation

Zhaoying Zhou, Jijun Xiong, Xiongying Ye, Xiaohao Wang, and Yanyin Feng "Designing, fabrication, and test of a MEMS colloid thruster", Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); https://doi.org/10.1117/12.483164

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