A novel capacitive type miniature microphone with a flexure hinge diaphragm

Hye Jin Kim; Sung Q. Lee; Kang Ho Park

doi:10.1117/12.686008

19 October 2006 A novel capacitive type miniature microphone with a flexure hinge diaphragm

Hye Jin Kim, Sung Q. Lee, Kang Ho Park

Proceedings Volume 6374, Optomechatronic Actuators, Manipulation, and Systems Control; 63740H (2006) https://doi.org/10.1117/12.686008
Event: Optics East 2006, 2006, Boston, Massachusetts, United States

Abstract

This paper presents a novel, highly sensitive condenser microphone with a flexure hinge diaphragm. We used the finiteelement analysis (FEA) to evaluate the mechanical and acoustic performance of the condenser microphone with a hinge diaphragm. And we fabricated the miniature condenser microphones with area of 1.5 mm x 1.5 mm. From the simulation and measurement results, we confirmed that the maximum displacements at the center of flexure hinge diaphragms are several hundred times, compared with flat diaphragms. Moreover, the miniature microphones have obtained -3 dB bandwidth of nearly 20 kHz by proper design of the flexure hinge diaphragms.

Citation Download Citation

Hye Jin Kim, Sung Q. Lee, and Kang Ho Park "A novel capacitive type miniature microphone with a flexure hinge diaphragm", Proc. SPIE 6374, Optomechatronic Actuators, Manipulation, and Systems Control, 63740H (19 October 2006); https://doi.org/10.1117/12.686008

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