UV-curable polymers with chemically-bonded carbon nanotubes for MEMS applications

Jining Xie; Nanyan Zhang; Manton Guers; Vijay K. Varadan

doi:10.1117/12.473338

14 November 2002 UV-curable polymers with chemically-bonded carbon nanotubes for MEMS applications

Jining Xie, Nanyan Zhang, Manton Guers, Vijay K. Varadan

Proceedings Volume 4935, Smart Structures, Devices, and Systems; (2002) https://doi.org/10.1117/12.473338
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

Current ultraviolet (UV) curable polymer techniques for MEMS fabrication pose certain challenges due to the electrical and mechanical properties of the polymer. A novel UV-curable polymer uniformly bonded with functionalized nanotubes was synthesized via a modified threestep in-situ polymerization. Purified multi-walled nanotubes, gained from the microwave chemical vapor deposition method, were functionalized by oxidation. X-ray photoelectron spectroscopy (XPS) was used to identify the —OH and —COOH groups attached to nanotube surface. The UV curable polymer was prepared from toluene diisocyanate (TDI), functionalized nanotubes, and 2-hydroxyethyl methacrylate (HEMA). The chemical bonds between —NCO groups of TDI and —OH, -COOH groups of functionalized nanotubes were confirmed by Fourier transform infrared (FTIR) spectra. This new UV-curable polymer is expected to be a costeffective solution with a variety of applications in UV coating, phase shifters for telecommunications and global positioning systems, and polymer and BioMEMS devices.

Citation Download Citation

Jining Xie, Nanyan Zhang, Manton Guers, and Vijay K. Varadan "UV-curable polymers with chemically-bonded carbon nanotubes for MEMS applications", Proc. SPIE 4935, Smart Structures, Devices, and Systems, (14 November 2002); https://doi.org/10.1117/12.473338

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