Novel micromachining method based on AFM and high-accuracy stage

Yongda Yan; Tao Sun; Shen Dong; Kai Cheng

doi:10.1117/12.472724

15 January 2003 Novel micro-machining method basing on AFM and high-accuracy stage

Yongda Yan, Tao Sun, Shen Dong, Kai Cheng

Proceedings Volume 4979, Micromachining and Microfabrication Process Technology VIII; (2003) https://doi.org/10.1117/12.472724
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

This paper presents an easy and novel mechanical micro-machining method. Combining the commercial AFM and the high accuracy stage and using a diamond tip as the cutting tool which acts as a single asperity, a mechanical micro-machining system is developed. Some experiments are carried out basing on this system. Influence of the diamond tip’s shape on micro machining is considered. And different machining techniques are compared in this paper. Using this method the intricate patterns (circle, flat, polygon flat and a gear geometry) are successfully fabricated. So the novel approach’s strength are as follows: It can machine several tens of microns micro-parts more easier and cheaper then the conventional technology. And it can image the micro-structure just after it is machined. Generally this technique can be used to machine the mask of other micro-machining process, the mold of micro-parts, or to machine on the micro-part which is fabricated by other ways.

Citation Download Citation

Yongda Yan, Tao Sun, Shen Dong, and Kai Cheng "Novel micro-machining method basing on AFM and high-accuracy stage", Proc. SPIE 4979, Micromachining and Microfabrication Process Technology VIII, (15 January 2003); https://doi.org/10.1117/12.472724

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