Dual-function leak detector for MEMS devices

Yufeng Jin; Zhiping Wang; Zhen Feng Wang; X. Q. Shi; P. C. Lim; Min Miao; X. C. Shan

doi:10.1117/12.472715

16 January 2003 A Dual-function leak detector for MEMS devices

Yufeng Jin, Zhiping Wang, Zhen Feng Wang, X. Q. Shi, P. C. Lim, Min Miao, X. C. Shan

Proceedings Volume 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II; (2003) https://doi.org/10.1117/12.472715
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

In this paper, the development of a dual-function leak detector is presented. The system consists of a laser interference instrument, a portable helium leakage detector, a specially designed test chamber with a quartz-glass observation window, a pressure gauge. The developed measuring system offers new features for experimental investigation on the integrity of hermetic sealed structure. Both helium bombing mode and diaphragm deflection mode were investigated using the developed detector. Basically, the system can be used for helium leak bombing detection. By employing this system for leakage detection in a micro optical switch, it was shown that a leakage of less than 10^-7std cc/sec can be measured. The system can also be used to measure the surface deflection of a diaphragm. The measurement was accomplished by using laser interference technique to monitor the pressure variation within the small cavity of MEMS devices after pressurized gas was introduced. A leakage as low as 10^-14 std cc/sec could be detected for a sample with several cubic millimeter cavity of 10^-4 mbar.

Citation Download Citation

Yufeng Jin, Zhiping Wang, Zhen Feng Wang, X. Q. Shi, P. C. Lim, Min Miao, and X. C. Shan "A Dual-function leak detector for MEMS devices", Proc. SPIE 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II, (16 January 2003); https://doi.org/10.1117/12.472715

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