Investigation of NEG thick film for vacuum packaging of MEMS

Yufeng Jin; Zhi Ping Wang; L. Zhao; P. C. Lim; J. Wei

doi:10.1117/12.472716

16 January 2003 An Investigation on NEG Thick Film for Vacuum packaging of MEMS

Yufeng Jin, Zhi Ping Wang, L. Zhao, P. C. Lim, J. Wei

Proceedings Volume 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II; (2003) https://doi.org/10.1117/12.472716
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

An approach to maintain vacuum in MEMS devices, by integrating MEMS fabrication process with getter material preparation, is presented in this paper. A coating process for thick film of getter material on silicon and glass wafers, which are common materials in fabrication of MEMS devices and package, has been investigated in detail. The getter material consists of a powder mixture of zirconium, vanadium and iron, which features high sorption capability to active gas such as H₂, O₂, N₂, CO and H₂O vapor. Several patterned NEG thick films to simulate different needs in MEMS application have been made. The sorption capacity of the coated getter material was examined. The coating of NEG thick film onto the inner surface of a MEMS pressure sensor and the activation of NEG during anodic bonding process were carried out.

Citation Download Citation

Yufeng Jin, Zhi Ping Wang, L. Zhao, P. C. Lim, and J. Wei "An Investigation on NEG Thick Film for Vacuum packaging of MEMS", Proc. SPIE 4980, Reliability, Testing, and Characterization of MEMS/MOEMS II, (16 January 2003); https://doi.org/10.1117/12.472716

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available