Robust control of electrostatic torsional micromirrors using adaptive sliding-mode control

Harshad S. Sane; Navid Yazdi; Carlos H. Mastrangelo

doi:10.1117/12.600083

22 January 2005 Robust control of electrostatic torsional micromirrors using adaptive sliding-mode control

Harshad S. Sane, Navid Yazdi, Carlos H. Mastrangelo

Proceedings Volume 5719, MOEMS and Miniaturized Systems V; (2005) https://doi.org/10.1117/12.600083
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

This paper presents high-resolution control of torsional electrostatic micromirrors beyond their inherent pull-in instability using robust sliding-mode control (SMC). The objectives of this paper are two-fold - firstly, to demonstrate the applicability of SMC for MEMS devices; secondly - to present a modified SMC algorithm that yields improved control accuracy. SMC enables compact realization of a robust controller tolerant of device characteristic variations and nonlinearities. Robustness of the control loop is demonstrated through extensive simulations and measurements on MEMS with a wide range in their characteristics. Control of two-axis gimbaled micromirrors beyond their pull-in instability with overall 10-bit pointing accuracy is confirmed experimentally. In addition, this paper presents an analysis of the sources of errors in discrete-time implementation of the control algorithm. To minimize these errors, we present an adaptive version of the SMC algorithm that yields substantial performance improvement without considerably increasing implementation complexity.

Citation Download Citation

Harshad S. Sane, Navid Yazdi, and Carlos H. Mastrangelo "Robust control of electrostatic torsional micromirrors using adaptive sliding-mode control", Proc. SPIE 5719, MOEMS and Miniaturized Systems V, (22 January 2005); https://doi.org/10.1117/12.600083

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