Design and fabrication of trihedral corner-cube arrays using analog exposure based on phase masks

Heidi Hockel; Ricardo F. Martins; Jinwon Sung; Eric G. Johnson

doi:10.1117/12.591996

22 January 2005 Design and fabrication of trihedral corner-cube arrays using analog exposure based on phase masks

Heidi Hockel, Ricardo F. Martins, Jinwon Sung, Eric G. Johnson

Proceedings Volume 5720, Micromachining Technology for Micro-Optics and Nano-Optics III; (2005) https://doi.org/10.1117/12.591996
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

Trihedral corner cube arrays are efficient retro-reflectors. They are integral parts in numerous imaging and sensing applications. However, the fabrication of these trihedral arrays can prove to be both difficult and cost prohibitive. Using a phase-only mask, we have fabricated an array of analog reflectors which can then be tiled using a photolithographic stepper. The elements are designed using a fixed period and varying fill factor to create the analog slope of each side wall. The overall depth of the array can be controlled by both the exposure and etching processes to ultimately create the desired effect. After etching, a single coating of metal finishes the process, and the elements can then be diced out and integrated into each specific application. The etched arrays may alternatively be used as a mold to create high volumes of the desired element. The design and fabrication parameters for trihedral corner cube arrays will be discussed in detail. The advantages and limitations will then be discussed.

Citation Download Citation

Heidi Hockel, Ricardo F. Martins, Jinwon Sung, and Eric G. Johnson "Design and fabrication of trihedral corner-cube arrays using analog exposure based on phase masks", Proc. SPIE 5720, Micromachining Technology for Micro-Optics and Nano-Optics III, (22 January 2005); https://doi.org/10.1117/12.591996

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available