Micro/nano grating and its application to moiré measurement

Huimin Xie; Zhanwei Liu; Haixia Shang; Qikun Xue; Jinfeng Jia; Daining Fang

doi:10.1117/12.621896

12 April 2005 Micro/nano grating and its application to moire measurement

Huimin Xie, Zhanwei Liu, Haixia Shang, Qikun Xue, Jinfeng Jia, Daining Fang

Proceedings Volume 5852, Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics; (2005) https://doi.org/10.1117/12.621896
Event: Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics, 2004, -, Singapore

Abstract

In this paper, some novel micro/nano- moire grating fabricating techniques are introduced. The gratings are produced by the SPM lithography, FIB lithography, and molecular beam epitaxy (MBE) method. The moire patterns formed with these gratings are also introduced. The gratings are successfully to be used to measure the residual deformation in the surface around a step edge of the Al/Si artificial nanocluster with the moire methods. The successful experimental results verify the feasibility of these methods.

Citation Download Citation

Huimin Xie, Zhanwei Liu, Haixia Shang, Qikun Xue, Jinfeng Jia, and Daining Fang "Micro/nano grating and its application to moire measurement", Proc. SPIE 5852, Third International Conference on Experimental Mechanics and Third Conference of the Asian Committee on Experimental Mechanics, (12 April 2005); https://doi.org/10.1117/12.621896

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