MEMS-based testing stage to study electrical and mechanical properties of nanocrystalline metal films

Jong H. Han; Jagannathan Rajagopalan; M. Taher A. Saif

doi:10.1117/12.706115

12 February 2007 MEMS-based testing stage to study electrical and mechanical properties of nanocrystalline metal films

Jong H. Han, Jagannathan Rajagopalan, M. Taher A. Saif

Proceedings Volume 6464, MEMS/MOEMS Components and Their Applications IV; 64640C (2007) https://doi.org/10.1117/12.706115
Event: MOEMS-MEMS 2007 Micro and Nanofabrication, 2007, San Jose, California, United States

Abstract

We have developed a MEMS-based testing stage that can quantitatively characterize both the electrical and mechanical properties of nanocrystalline metal films. This stage, which is SEM and TEM compatible, is a modified version of an earlier MEMS-based tensile testing stage (M. A. Haque and M. T. A. Saif, Proc. Natl. Acad. Sci., 101(17), 6335-6340 (2004)). This modified stage requires a simpler fabrication procedure, involving fewer lithography and etching steps, and has higher yield compared to the earlier version. It allows for 4-point electrical resistivity measurement, and in-situ tensile testing in SEM and TEM of free-standing nano-scale metal films. The stage was used to perform a tensile test on a 100-nm-thick aluminum film and electrical resistivity measurement on a 110-nm-thick aluminum film, the results of which are described.

Citation Download Citation

Jong H. Han, Jagannathan Rajagopalan, and M. Taher A. Saif "MEMS-based testing stage to study electrical and mechanical properties of nanocrystalline metal films", Proc. SPIE 6464, MEMS/MOEMS Components and Their Applications IV, 64640C (12 February 2007); https://doi.org/10.1117/12.706115

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