Novel construction of a deformable mirror for laser beam shaping

Claudia Bruchmann; Ramona Eberhardt; Erik Beckert; Thomas Peschel; Steffen Gramens; Sylvia E. Gebhardt; Andreas Tünnermann

doi:10.1117/12.809557

23 February 2009 Novel construction of a deformable mirror for laser beam shaping

Claudia Bruchmann, Ramona Eberhardt, Erik Beckert, Thomas Peschel, Steffen Gramens, Sylvia E. Gebhardt, Andreas Tünnermann

Author Affiliations +

Proceedings Volume 7209, MEMS Adaptive Optics III; 72090B (2009) https://doi.org/10.1117/12.809557
Event: SPIE MOEMS-MEMS: Micro- and Nanofabrication, 2009, San Jose, California, United States

Abstract

This paper reports on a novel construction of a deformable mirror for laser beam shaping. The deformable mirror is actuated by screen-printed thick film piezoceramic unimorphs based on lead zirconate titanate (PZT). Different actuator layouts are realized and will be presented. We use Low Temperature Cofired Ceramics (LTCC) as a substrate material with a metallization as reflective surface. LTCC offers easy integration of holding structures. The reflective mirror surface is electroplated copper. After deposition, the copper layer is diamond machined to achieve excellent optical surface quality <10 nm (rms). We build deformable mirrors with 1, 13 and 19 actuators and a total stroke of more than 20 μm and characterize them with a wave front sensor.

Citation Download Citation

Claudia Bruchmann, Ramona Eberhardt, Erik Beckert, Thomas Peschel, Steffen Gramens, Sylvia E. Gebhardt, and Andreas Tünnermann "Novel construction of a deformable mirror for laser beam shaping", Proc. SPIE 7209, MEMS Adaptive Optics III, 72090B (23 February 2009); https://doi.org/10.1117/12.809557

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