New results of unimorph laser mirrors with screen printed actuator

C. Bruchmann; T. Burkhardt; A. Kamm; Sylvia Gebhardt; Erik Beckert; Ramona Eberhardt; Andreas Tünnermann

doi:10.1117/12.843810

18 February 2010 New results of unimorph laser mirrors with screen printed actuator

C. Bruchmann, T. Burkhardt, A. Kamm, Sylvia Gebhardt, Erik Beckert, Ramona Eberhardt, Andreas Tünnermann

Proceedings Volume 7595, MEMS Adaptive Optics IV; 75950J (2010) https://doi.org/10.1117/12.843810
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

This paper reports on new results of the development of a unimorph laser beam shaping mirror based on Low Temperature Cofired Ceramics (LTCC). The deformable mirror is actuated by a side screen printed piezoceramic thick film based on lead zirconate titanate (PZT). The reflective surface is electroplated copper that is diamond machined to flatten the surface. We introduce the solder jet bumbing fixation technology to mount the deformable mirror into a metallic mounting. This assembling technology introduces very little energy input and thus also very little deformation into the mirror. The material of the mounting is CE7 that is especially thermal adapted to the deformable mirror. We will present results on deflection and resonance frequency for two different mirror designs.

Citation Download Citation

C. Bruchmann, T. Burkhardt, A. Kamm, Sylvia Gebhardt, Erik Beckert, Ramona Eberhardt, and Andreas Tünnermann "New results of unimorph laser mirrors with screen printed actuator", Proc. SPIE 7595, MEMS Adaptive Optics IV, 75950J (18 February 2010); https://doi.org/10.1117/12.843810

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