Fabrication and estimation of electromagnetic type microactuators with microcoil

D. Noda; M. Setomoto; Y. Kobayashi; T. Hattori

doi:10.1117/12.810133

30 December 2008 Fabrication and estimation of electromagnetic type microactuators with microcoil

D. Noda, M. Setomoto, Y. Kobayashi, T. Hattori

Proceedings Volume 7268, Smart Structures, Devices, and Systems IV; 726802 (2008) https://doi.org/10.1117/12.810133
Event: SPIE Smart Materials, Nano- and Micro-Smart Systems, 2008, Melbourne, Australia

Abstract

Recently, the requests for actuator are small size, high output power and lower electrical power, and so on. We are focusing on an electromagnetic type actuator. Nonetheless, this type actuator is known to be unsuitable for miniaturization because an allowable current carrying capacity is small. Therefore, we fabricated microcoil with narrow pitch and high aspect ratio using deep X-ray lithography and metallization techniques. If the aspect ratio is increased, cross section area of coil lines is also increased allowing a greater current path. We have fabricated coil lines with the width of 10 μm and the aspect ratio of over 5 on acrylic pipe surface. For current paths, copper layer was formed between narrow pitch thread structures on pipe by electroforming. Finally, isotropic copper etching was performed until the insulated portions of the wiring were exposed. We have estimated a suction force of electromagnetic actuator using this microcoil. The theoretical values by simulation and actual measurements of suction force were compared. These results are relatively in good agreement with theoretical values. Thus, it is very expected that microcoils with high aspect ratio and microactuators with high output force could be manufactured in spite of the miniature size.

Citation Download Citation

D. Noda, M. Setomoto, Y. Kobayashi, and T. Hattori "Fabrication and estimation of electromagnetic type microactuators with microcoil", Proc. SPIE 7268, Smart Structures, Devices, and Systems IV, 726802 (30 December 2008); https://doi.org/10.1117/12.810133

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