Fabrication of an electromagnetic actuator with the planar coil

HyunKu Jeong; OkChan Jeong; Sang Sik Yang

doi:10.1117/12.388905

21 June 2000 Fabrication of an electromagnetic actuator with the planar coil

HyunKu Jeong, OkChan Jeong, Sang Sik Yang

Proceedings Volume 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS; (2000) https://doi.org/10.1117/12.388905
Event: SPIE's 7th Annual International Symposium on Smart Structures and Materials, 2000, Newport Beach, CA, United States

Abstract

This paper first presents the fabrication of an electromagnetic microactuator using an electroplated spiral copper coil on a parylene C diaphragm. The parylene is a bio-compatible material and has a very low Young's modulus less than 2.8 Gpa, which makes the large deflection for the low power consumption. The actuator consists of an electroplated coil on the parylene C diaphragm, a small-size permanent magnet and a core. The diaphragm is actuated by the Lorenz force generated by the current through the coil in the magnetic field of the magnet. The size of the actuator diaphragm is 4 by 4 mm² and 5 micrometers thick. The resistance and inductance of the copper spiral coil are 2 (Omega) and 11 (mu) H at 100 Hz, respectively. The center deflection of the actuator diaphragm is measured with the laser vibrometer. Whenthe current through the coil is 380 mA, the peak-to-peak deflection of the actuator is 143 micrometers below the resonant frequency of 35 Hz. The mechanical sensitivity of the actuator diaphragm is 900 micrometers /A at 10 Hz and 35 Hz, respectively. An electromagnetic microactuator using the electroplated copper coil on the parylene diaphragm is expected to be useful in making a micropump for the bio-medical use.

Citation Download Citation

HyunKu Jeong, OkChan Jeong, and Sang Sik Yang "Fabrication of an electromagnetic actuator with the planar coil", Proc. SPIE 3990, Smart Structures and Materials 2000: Smart Electronics and MEMS, (21 June 2000); https://doi.org/10.1117/12.388905

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