CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume 7268 > Article
Paper
30 December 2008 A smart resonating micro-cantilever in MEMS gas sensor: improved design
Jia Hao Zhao, Shi Jie Yu, Ke Li, Qin Zhou, Zheng You
Author Affiliations +
Proceedings Volume 7268, Smart Structures, Devices, and Systems IV; 72680T (2008) https://doi.org/10.1117/12.810579
Event: SPIE Smart Materials, Nano- and Micro-Smart Systems, 2008, Melbourne, Australia
Abstract
A smart micro-cantilever in a creative gas sensor with high sensitivity is presented. The resonance frequency shifting of the cantilever is monitored to detect its mass change caused by adsorption of certain gas molecules. The cantilever has a more compact MEMS structure and the smart functions because of the sensor with a self-actuating and detecting (SAD) vibration system, which is integration of a vibration actuating system and a detecting system. The model of the smart beam is analyzed by computer simulation. Design rules of the beam are obtained according to related discuss with function goal of extremely rare gas detection. After fabrication and test of the smart cantilever, an improved solution of the smart cantilever is introduced by comparison study of the computer simulation and experiment results of the fabricated beam.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Jia Hao Zhao, Shi Jie Yu, Ke Li, Qin Zhou, and Zheng You "A smart resonating micro-cantilever in MEMS gas sensor: improved design", Proc. SPIE 7268, Smart Structures, Devices, and Systems IV, 72680T (30 December 2008); https://doi.org/10.1117/12.810579
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 8 PAGES
DOWNLOAD PAPER SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Microelectromechanical systems
Gas sensors
Sensors
Computer simulations
Actuators
Adsorption
Electrodes
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top