Meso-scale simulation of the line-edge structure based on polymer chains in the developing and rinse process

Hiroshi Morita; Masao Doi

doi:10.1117/12.846526

25 March 2010 Meso-scale simulation of the line-edge structure based on polymer chains in the developing and rinse process

Hiroshi Morita, Masao Doi

Author Affiliations +

Proceedings Volume 7639, Advances in Resist Materials and Processing Technology XXVII; 763932 (2010) https://doi.org/10.1117/12.846526
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States

Abstract

To study the line edge roughness, we developed the simulation method of formation process of line edge based on the meso-scale simulation of dissipative particle dynamics (DPD) method. We modeled the development and rinse processes based on the coarse-grained polymer model. It is important that the block copolymer in which the soluble and insoluble blocks are bonded exists at the line edge. Though the soluble part of this block copolymer is stretched out in the developing process, it becomes shrunk in the rinse process. The shrunk polymers contribute to the formation of line edge, and LER was much influenced by these polymers. These simulations will represent the formation process of line edge based on the polymer chain dynamics.

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Hiroshi Morita and Masao Doi "Meso-scale simulation of the line-edge structure based on polymer chains in the developing and rinse process", Proc. SPIE 7639, Advances in Resist Materials and Processing Technology XXVII, 763932 (25 March 2010); https://doi.org/10.1117/12.846526

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