High reliability ArF light source for double patterning immersion lithography

Rostislav Rokitski; Toshi Ishihara; Rajeskar Rao; Rui Jiang; Mary Haviland; Theodore Cacouris; Daniel Brown

doi:10.1117/12.849065

3 March 2010 High reliability ArF light source for double patterning immersion lithography

Rostislav Rokitski, Toshi Ishihara, Rajeskar Rao, Rui Jiang, Mary Haviland, Theodore Cacouris, Daniel Brown

Proceedings Volume 7640, Optical Microlithography XXIII; 76401Q (2010) https://doi.org/10.1117/12.849065
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States

Abstract

Double patterning lithography places significant demands not only on the optical performance of the light source (higher power, improved parametric stability), but also on high uptime in order to meet the higher throughput requirements of the litho cell. In this paper, we will describe the challenges faced in delivering improved performance while achieving better reliability and resultant uptime as embodied in the XLR 600ix light source from Cymer, announced one year ago. Data from extended life testing at 90W operation will be shown to illustrate these improvements.

Citation Download Citation

Rostislav Rokitski, Toshi Ishihara, Rajeskar Rao, Rui Jiang, Mary Haviland, Theodore Cacouris, and Daniel Brown "High reliability ArF light source for double patterning immersion lithography", Proc. SPIE 7640, Optical Microlithography XXIII, 76401Q (3 March 2010); https://doi.org/10.1117/12.849065

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available