Computational studies of shape rectification in directed self-assembly

Tatsuhiro Iwama; Nabil Laachi; Kris T. Delaney; Bongkeun Kim; Glenn H. Fredrickson

doi:10.1117/12.2046187

28 March 2014 Computational studies of shape rectification in directed self-assembly

Tatsuhiro Iwama, Nabil Laachi, Kris T. Delaney, Bongkeun Kim, Glenn H. Fredrickson

Proceedings Volume 9049, Alternative Lithographic Technologies VI; 904927 (2014) https://doi.org/10.1117/12.2046187
Event: SPIE Advanced Lithography, 2014, San Jose, California, United States

Abstract

We use self-consistent field theory (SCFT) to study shape rectification in overlapped cylindrical and non-cylindrical prepatterns. Specifically, we examine the potential of directed self-assembly (DSA) of block copolymers to not only reduce critical dimensions relative to the template, but also repair defects in the guiding prepatterns and produce defectfree contact holes. In our study over a wide range of prepattern dimensions, we found that defects in the central minorblock domain arise with decreasing center-to-center distance of the prepattern. Increasing the minor-block fraction in the block copolymer was observed to remove some of the defects. We also studied the effect of adding homopolymer to the block copolymer melt and show how blends can successfully eliminate defects and increase the range of the process window relative to the neat diblock case without influencing domain properties such as the critical dimension and the hole-to-hole distance.

Citation Download Citation

Tatsuhiro Iwama, Nabil Laachi, Kris T. Delaney, Bongkeun Kim, and Glenn H. Fredrickson "Computational studies of shape rectification in directed self-assembly", Proc. SPIE 9049, Alternative Lithographic Technologies VI, 904927 (28 March 2014); https://doi.org/10.1117/12.2046187

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available