Correlation of actinic blank inspection and experimental phase defect printability on NXE3x00 EUV scanner

R. Jonckheere; D. Van den Heuvel; N. Takagi; H. Watanabe; E. Gallagher

doi:10.1117/12.2085801

13 March 2015 Correlation of actinic blank inspection and experimental phase defect printability on NXE3x00 EUV scanner

R. Jonckheere, D. Van den Heuvel, N. Takagi, H. Watanabe, E. Gallagher

Proceedings Volume 9422, Extreme Ultraviolet (EUV) Lithography VI; 942216 (2015) https://doi.org/10.1117/12.2085801
Event: SPIE Advanced Lithography, 2015, San Jose, California, United States

Abstract

One challenge of extreme ultraviolet (EUV) mask defectivity is the severe printability of defects of the multi-layer (ML) mirror on the mask. These ML-defects are just nanometer high or deep local distortions of this ML mirror. Dedicated blank inspection tools have become available over time. One of them is the actinic blank inspection tool under development through EIDEC (Lasertec ABI). EIDEC and imec have jointly correlated its blank defect detection capability to wafers printed on ASML NXE3100 and NXE3300 scanners. Printing ML-defects were identified by wafer inspection, followed by subsequent repeater analysis, and correlated back to blank inspection. Forward correlation of ABI detections to the printed wafer was also successfully undertaken. The focus of this work has been on native defects. This paper will discuss the obtained results from the perspective of how to use ABI to assess which kind of native ML defects need to be avoided during blank fabrication.

Citation Download Citation

R. Jonckheere, D. Van den Heuvel, N. Takagi, H. Watanabe, and E. Gallagher "Correlation of actinic blank inspection and experimental phase defect printability on NXE3x00 EUV scanner", Proc. SPIE 9422, Extreme Ultraviolet (EUV) Lithography VI, 942216 (13 March 2015); https://doi.org/10.1117/12.2085801

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available