A bimorph electrothermal actuator for micromirror devices

Sergey S. Evstafyev; Sergey P. Timoshenkov; Igor M. Britkov; Vyacheslav K. Samoilykov; Anatolij M. Tereshhenko

doi:10.1117/12.2176817

22 May 2015 A bimorph electrothermal actuator for micromirror devices

Sergey S. Evstafyev, Sergey P. Timoshenkov, Igor M. Britkov, Vyacheslav K. Samoilykov, Anatolij M. Tereshhenko

Proceedings Volume 9467, Micro- and Nanotechnology Sensors, Systems, and Applications VII; 94672X (2015) https://doi.org/10.1117/12.2176817
Event: SPIE Defense + Security, 2015, Baltimore, MD, United States

Abstract

The research and development results along the characteristics of the micro-mirror element driven by thermal microactuator are presented. This work shows that for calculating micro-mirror element deflection is crucial for consideration the temperature distribution along the length of the micromirror element. The calculation of the superheat temperature is provided, along with the effective overheat temperature. Provided calculations are in good correlation with experimental data.

Citation Download Citation

Sergey S. Evstafyev, Sergey P. Timoshenkov, Igor M. Britkov, Vyacheslav K. Samoilykov, and Anatolij M. Tereshhenko "A bimorph electrothermal actuator for micromirror devices", Proc. SPIE 9467, Micro- and Nanotechnology Sensors, Systems, and Applications VII, 94672X (22 May 2015); https://doi.org/10.1117/12.2176817

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