Chemoepitaxial guiding underlayers for density asymmetric and energetically asymmetric diblock copolymers

Benjamin D. Nation; Peter J. Ludovice; Clifford L. Henderson

doi:10.1117/12.2219255

1 April 2016 Chemoepitaxial guiding underlayers for density asymmetric and energetically asymmetric diblock copolymers

Benjamin D. Nation, Peter J. Ludovice, Clifford L. Henderson

Proceedings Volume 9777, Alternative Lithographic Technologies VIII; 97771V (2016) https://doi.org/10.1117/12.2219255
Event: SPIE Advanced Lithography, 2016, San Jose, California, United States

Abstract

Block copolymers, polymers composed of two or more homopolymers covalently bonded together, are currently being investigated as a method to extend optical lithography due to their ability to microphase separate on small size scales. In order to drive down the size that these BCPs phase separate, the BCPs with larger Flory-Huggin's χparameter needs to be found. Typically these BCPs are composed of more dissimilar homopolymers. However, changing these interactions also changes how BCPs interact with their guiding underlayers. In this paper, several block copolymers are simulated annealing on chemoepitaxial guiding underlayers using a coarse-grained molecular dynamics model in order to explore the effect that either energetic asymmetry or density asymmetry in the BCP have on the pattern registration. It is found that energetic asymmetry in BCPs causes one of the blocks to desire to skin, which shifts the composition of the background region that leads to well aligned vertical lamellae formation. It is hypothesized that moderate footing and undercutting at the underlayer or slight skinning at the free surface can increase the kinetics of defect annihilation by decreasing the distance that bridges must form. The density asymmetric BCPs simulated in this paper have different mechanical properties which lead to straighter sidewalls in the BCP film and potentially lead to better pattern registration. It is hypothesized that altering the compressibility of the blocks can alter equilibrium defectivity.

Citation Download Citation

Benjamin D. Nation, Peter J. Ludovice, and Clifford L. Henderson "Chemoepitaxial guiding underlayers for density asymmetric and energetically asymmetric diblock copolymers", Proc. SPIE 9777, Alternative Lithographic Technologies VIII, 97771V (1 April 2016); https://doi.org/10.1117/12.2219255

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
8 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Bridges

Polymers

Skin

Optical lithography

Directed self assembly

Polymerization

Algorithms

Show All Keywords

Keywords/Phrases

Search In:

Publication Years