Next-generation immersion scanner optimizing on-product performance for 7nm node

Yasushi Yoda; Akira Hayakawa; Satoshi Ishiyama; Yasuhiro Ohmura; Issei Fujimoto; Toru Hirayama; Yuji Shiba; Kazuo Masaki; Yuichi Shibazaki

doi:10.1117/12.2218955

15 March 2016 Next-generation immersion scanner optimizing on-product performance for 7nm node

Yasushi Yoda, Akira Hayakawa, Satoshi Ishiyama, Yasuhiro Ohmura, Issei Fujimoto, Toru Hirayama, Yuji Shiba, Kazuo Masaki, Yuichi Shibazaki

Author Affiliations +

Proceedings Volume 9780, Optical Microlithography XXIX; 978012 (2016) https://doi.org/10.1117/12.2218955
Event: SPIE Advanced Lithography, 2016, San Jose, California, United States

Abstract

The semiconductor technology roadmap suggests that multiple patterning techniques will be used at the 7nm node. The final lithography accuracy is determined by what is known as the "on-product" performance, which includes projection lens heating, illumination condition variations, product wafer related errors, and long term stability. It is evident that on product performance improvement is imperative now, and will become even more crucial in coming years. Nikon has developed the next-generation lithography system focusing on optimizing the main factors impacting on product performance. In this paper, we will introduce the details of the next-generation Nikon scanner and provide supporting performance data.

Citation Download Citation

Yasushi Yoda, Akira Hayakawa, Satoshi Ishiyama, Yasuhiro Ohmura, Issei Fujimoto, Toru Hirayama, Yuji Shiba, Kazuo Masaki, and Yuichi Shibazaki "Next-generation immersion scanner optimizing on-product performance for 7nm node", Proc. SPIE 9780, Optical Microlithography XXIX, 978012 (15 March 2016); https://doi.org/10.1117/12.2218955

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available